{"id":136049,"date":"2025-06-30T14:34:05","date_gmt":"2025-06-30T06:34:05","guid":{"rendered":"https:\/\/www.alpapowder.com\/136049\/"},"modified":"2025-06-30T14:34:05","modified_gmt":"2025-06-30T06:34:05","slug":"khi-che-tao-tinh-the-silic-cacbua-don-chat-luong-cao-can-luu-y-dieu-gi","status":"publish","type":"post","link":"https:\/\/www.alpapowder.com\/vi\/136049\/","title":{"rendered":"Khi ch\u1ebf t\u1ea1o tinh th\u1ec3 silic cacbua \u0111\u01a1n ch\u1ea5t l\u01b0\u1ee3ng cao c\u1ea7n l\u01b0u \u00fd \u0111i\u1ec1u g\u00ec?"},"content":{"rendered":"

\"\"<\/p>\n

C\u00e1c ph\u01b0\u01a1ng ph\u00e1p hi\u1ec7n t\u1ea1i \u0111\u1ec3 ch\u1ebf t\u1ea1o tinh th\u1ec3 \u0111\u01a1n silicon carbide ch\u1ee7 y\u1ebfu bao g\u1ed3m: v\u1eadn chuy\u1ec3n h\u01a1i v\u1eadt l\u00fd (PVT), ph\u00e1t tri\u1ec3n dung d\u1ecbch h\u1ea1t gi\u1ed1ng tr\u00ean c\u00f9ng (TSSG) v\u00e0 l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc \u1edf nhi\u1ec7t \u0111\u1ed9 cao (HT-CVD).<\/p>\n

Trong s\u1ed1 \u0111\u00f3, ph\u01b0\u01a1ng ph\u00e1p PVT c\u00f3 \u01b0u \u0111i\u1ec3m l\u00e0 thi\u1ebft b\u1ecb \u0111\u01a1n gi\u1ea3n, ki\u1ec3m so\u00e1t v\u1eadn h\u00e0nh d\u1ec5 d\u00e0ng, gi\u00e1 thi\u1ebft b\u1ecb v\u00e0 chi ph\u00ed v\u1eadn h\u00e0nh th\u1ea5p v\u00e0 \u0111\u00e3 tr\u1edf th\u00e0nh ph\u01b0\u01a1ng ph\u00e1p ch\u00ednh \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong s\u1ea3n xu\u1ea5t c\u00f4ng nghi\u1ec7p.<\/p>\n

1. C\u00f4ng ngh\u1ec7 pha t\u1ea1p b\u1ed9t silicon carbide<\/p>\n

Pha t\u1ea1p m\u1ed9t l\u01b0\u1ee3ng nguy\u00ean t\u1ed1 Ce th\u00edch h\u1ee3p v\u00e0o b\u1ed9t silicon carbide c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c hi\u1ec7u qu\u1ea3 ph\u00e1t tri\u1ec3n \u1ed5n \u0111\u1ecbnh c\u1ee7a tinh th\u1ec3 \u0111\u01a1n 4H-SiC. Th\u1ef1c t\u1ebf \u0111\u00e3 ch\u1ee9ng minh r\u1eb1ng pha t\u1ea1p nguy\u00ean t\u1ed1 Ce v\u00e0o b\u1ed9t c\u00f3 th\u1ec3 l\u00e0m t\u0103ng t\u1ed1c \u0111\u1ed9 ph\u00e1t tri\u1ec3n c\u1ee7a tinh th\u1ec3 silicon carbide v\u00e0 l\u00e0m cho tinh th\u1ec3 ph\u00e1t tri\u1ec3n nhanh h\u01a1n; n\u00f3 c\u00f3 th\u1ec3 ki\u1ec3m so\u00e1t h\u01b0\u1edbng c\u1ee7a silicon carbide, l\u00e0m cho h\u01b0\u1edbng ph\u00e1t tri\u1ec3n tinh th\u1ec3 \u0111\u01a1n h\u01a1n v\u00e0 \u0111\u1ec1u \u0111\u1eb7n h\u01a1n; \u1ee9c ch\u1ebf s\u1ef1 ph\u00e1t sinh t\u1ea1p ch\u1ea5t trong tinh th\u1ec3, gi\u1ea3m s\u1ef1 ph\u00e1t sinh khuy\u1ebft t\u1eadt v\u00e0 gi\u00fap d\u1ec5 d\u00e0ng thu \u0111\u01b0\u1ee3c tinh th\u1ec3 \u0111\u01a1n v\u00e0 tinh th\u1ec3 ch\u1ea5t l\u01b0\u1ee3ng cao; n\u00f3 c\u00f3 th\u1ec3 \u1ee9c ch\u1ebf s\u1ef1 \u0103n m\u00f2n c\u1ee7a m\u1eb7t sau tinh th\u1ec3 v\u00e0 t\u0103ng t\u1ed1c \u0111\u1ed9 tinh th\u1ec3 \u0111\u01a1n c\u1ee7a tinh th\u1ec3.<\/p>\n

2. C\u00f4ng ngh\u1ec7 ki\u1ec3m so\u00e1t \u0111\u1ed9 d\u1ed1c tr\u01b0\u1eddng nhi\u1ec7t \u0111\u1ed9 tr\u1ee5c v\u00e0 h\u01b0\u1edbng t\u00e2m<\/p>\n

\u0110\u1ed9 d\u1ed1c nhi\u1ec7t \u0111\u1ed9 tr\u1ee5c ch\u1ee7 y\u1ebfu \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn d\u1ea1ng tinh th\u1ec3 ph\u00e1t tri\u1ec3n v\u00e0 hi\u1ec7u qu\u1ea3 ph\u00e1t tri\u1ec3n tinh th\u1ec3. \u0110\u1ed9 d\u1ed1c nhi\u1ec7t \u0111\u1ed9 qu\u00e1 nh\u1ecf s\u1ebd d\u1eabn \u0111\u1ebfn s\u1ef1 xu\u1ea5t hi\u1ec7n c\u1ee7a t\u1ea1p ch\u1ea5t trong qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3 v\u00e0 c\u0169ng s\u1ebd \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn t\u1ed1c \u0111\u1ed9 v\u1eadn chuy\u1ec3n c\u00e1c ch\u1ea5t pha kh\u00ed, d\u1eabn \u0111\u1ebfn t\u1ed1c \u0111\u1ed9 ph\u00e1t tri\u1ec3n tinh th\u1ec3 gi\u1ea3m. \u0110\u1ed9 d\u1ed1c nhi\u1ec7t \u0111\u1ed9 tr\u1ee5c v\u00e0 h\u01b0\u1edbng t\u00e2m th\u00edch h\u1ee3p gi\u00fap tinh th\u1ec3 SiC ph\u00e1t tri\u1ec3n nhanh v\u00e0 duy tr\u00ec s\u1ef1 \u1ed5n \u0111\u1ecbnh c\u1ee7a ch\u1ea5t l\u01b0\u1ee3ng tinh th\u1ec3.<\/p>\n

3. C\u00f4ng ngh\u1ec7 ki\u1ec3m so\u00e1t s\u1ef1 l\u1ec7ch v\u1ecb tr\u00ed m\u1eb7t ph\u1eb3ng c\u01a1 b\u1ea3n (BPD)<\/p>\n

L\u00fd do ch\u00ednh d\u1eabn \u0111\u1ebfn s\u1ef1 h\u00ecnh th\u00e0nh c\u00e1c khuy\u1ebft t\u1eadt BPD l\u00e0 \u1ee9ng su\u1ea5t c\u1eaft trong tinh th\u1ec3 v\u01b0\u1ee3t qu\u00e1 \u1ee9ng su\u1ea5t c\u1eaft quan tr\u1ecdng c\u1ee7a tinh th\u1ec3 SiC, d\u1eabn \u0111\u1ebfn s\u1ef1 k\u00edch ho\u1ea1t c\u1ee7a h\u1ec7 th\u1ed1ng tr\u01b0\u1ee3t. V\u00ec BPD vu\u00f4ng g\u00f3c v\u1edbi h\u01b0\u1edbng ph\u00e1t tri\u1ec3n tinh th\u1ec3 n\u00ean n\u00f3 ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c t\u1ea1o ra trong qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3 v\u00e0 qu\u00e1 tr\u00ecnh l\u00e0m m\u00e1t tinh th\u1ec3 sau \u0111\u00f3.<\/p>\n

4. C\u00f4ng ngh\u1ec7 ki\u1ec3m so\u00e1t \u0111i\u1ec1u ch\u1ec9nh t\u1ef7 l\u1ec7 th\u00e0nh ph\u1ea7n pha kh\u00ed<\/p>\n

Trong qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3, vi\u1ec7c t\u0103ng t\u1ef7 l\u1ec7 th\u00e0nh ph\u1ea7n pha kh\u00ed cacbon-silicon trong m\u00f4i tr\u01b0\u1eddng ph\u00e1t tri\u1ec3n l\u00e0 m\u1ed9t bi\u1ec7n ph\u00e1p hi\u1ec7u qu\u1ea3 \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c s\u1ef1 ph\u00e1t tri\u1ec3n \u1ed5n \u0111\u1ecbnh c\u1ee7a m\u1ed9t tinh th\u1ec3 duy nh\u1ea5t. V\u00ec t\u1ef7 l\u1ec7 cacbon-silicon cao c\u00f3 th\u1ec3 l\u00e0m gi\u1ea3m s\u1ef1 k\u1ebft t\u1ee5 b\u01b0\u1edbc l\u1edbn v\u00e0 duy tr\u00ec s\u1ef1 k\u1ebf th\u1eeba th\u00f4ng tin t\u0103ng tr\u01b0\u1edfng tr\u00ean b\u1ec1 m\u1eb7t tinh th\u1ec3 h\u1ea1t gi\u1ed1ng, n\u00ean n\u00f3 c\u00f3 th\u1ec3 \u1ee9c ch\u1ebf s\u1ef1 t\u1ea1o ra c\u00e1c d\u1ea1ng \u0111a h\u00ecnh.<\/p>\n

5. C\u00f4ng ngh\u1ec7 ki\u1ec3m so\u00e1t \u1ee9ng su\u1ea5t th\u1ea5p<\/p>\n

Trong qu\u00e1 tr\u00ecnh t\u0103ng tr\u01b0\u1edfng tinh th\u1ec3, s\u1ef1 hi\u1ec7n di\u1ec7n c\u1ee7a \u1ee9ng su\u1ea5t s\u1ebd khi\u1ebfn m\u1eb7t ph\u1eb3ng tinh th\u1ec3 b\u00ean trong c\u1ee7a tinh th\u1ec3 SiC b\u1ecb u\u1ed1n cong, d\u1eabn \u0111\u1ebfn ch\u1ea5t l\u01b0\u1ee3ng tinh th\u1ec3 k\u00e9m ho\u1eb7c th\u1eadm ch\u00ed l\u00e0 n\u1ee9t tinh th\u1ec3, v\u00e0 \u1ee9ng su\u1ea5t l\u1edbn s\u1ebd d\u1eabn \u0111\u1ebfn s\u1ef1 gia t\u0103ng s\u1ef1 d\u1ecbch chuy\u1ec3n m\u1eb7t ph\u1eb3ng c\u01a1 s\u1edf c\u1ee7a t\u1ea5m wafer. Nh\u1eefng khi\u1ebfm khuy\u1ebft n\u00e0y s\u1ebd x\u00e2m nh\u1eadp v\u00e0o l\u1edbp epitaxial trong qu\u00e1 tr\u00ecnh epitaxial v\u00e0 \u1ea3nh h\u01b0\u1edfng nghi\u00eam tr\u1ecdng \u0111\u1ebfn hi\u1ec7u su\u1ea5t c\u1ee7a thi\u1ebft b\u1ecb sau n\u00e0y.<\/p>\n

Nh\u00ecn v\u1ec1 ph\u00eda tr\u01b0\u1edbc, c\u00f4ng ngh\u1ec7 ch\u1ebf t\u1ea1o tinh th\u1ec3 \u0111\u01a1n SiC ch\u1ea5t l\u01b0\u1ee3ng cao s\u1ebd ph\u00e1t tri\u1ec3n theo m\u1ed9t s\u1ed1 h\u01b0\u1edbng:<\/p>\n

K\u00edch th\u01b0\u1edbc l\u1edbn<\/p>\n

Vi\u1ec7c ch\u1ebf t\u1ea1o tinh th\u1ec3 \u0111\u01a1n silicon carbide k\u00edch th\u01b0\u1edbc l\u1edbn c\u00f3 th\u1ec3 c\u1ea3i thi\u1ec7n hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t v\u00e0 gi\u1ea3m chi ph\u00ed, \u0111\u1ed3ng th\u1eddi \u0111\u00e1p \u1ee9ng nhu c\u1ea7u c\u1ee7a c\u00e1c thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t cao.<\/p>\n

Ch\u1ea5t l\u01b0\u1ee3ng cao<\/p>\n

Tinh th\u1ec3 \u0111\u01a1n silicon carbide ch\u1ea5t l\u01b0\u1ee3ng cao l\u00e0 ch\u00eca kh\u00f3a \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c c\u00e1c thi\u1ebft b\u1ecb hi\u1ec7u su\u1ea5t cao. Hi\u1ec7n nay, m\u1eb7c d\u00f9 ch\u1ea5t l\u01b0\u1ee3ng tinh th\u1ec3 \u0111\u01a1n silicon carbide \u0111\u00e3 \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3, nh\u01b0ng v\u1eabn c\u00f2n m\u1ed9t s\u1ed1 khuy\u1ebft \u0111i\u1ec3m nh\u01b0 micropipes, tr\u1eadt kh\u1edbp v\u00e0 t\u1ea1p ch\u1ea5t. Nh\u1eefng khuy\u1ebft \u0111i\u1ec3m n\u00e0y s\u1ebd \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn hi\u1ec7u su\u1ea5t v\u00e0 \u0111\u1ed9 tin c\u1eady c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n

Gi\u00e1 th\u00e0nh th\u1ea5p<\/p>\n

Chi ph\u00ed chu\u1ea9n b\u1ecb tinh th\u1ec3 \u0111\u01a1n silicon carbide cao, h\u1ea1n ch\u1ebf \u1ee9ng d\u1ee5ng c\u1ee7a ch\u00fang trong m\u1ed9t s\u1ed1 l\u0129nh v\u1ef1c. Chi ph\u00ed chu\u1ea9n b\u1ecb tinh th\u1ec3 \u0111\u01a1n silicon carbide c\u00f3 th\u1ec3 gi\u1ea3m b\u1eb1ng c\u00e1ch t\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh ph\u00e1t tri\u1ec3n, c\u1ea3i thi\u1ec7n hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t v\u00e0 gi\u1ea3m chi ph\u00ed nguy\u00ean li\u1ec7u th\u00f4.<\/p>\n

Th\u00f4ng minh<\/p>\n

V\u1edbi s\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a c\u00e1c c\u00f4ng ngh\u1ec7 nh\u01b0 tr\u00ed tu\u1ec7 nh\u00e2n t\u1ea1o v\u00e0 d\u1eef li\u1ec7u l\u1edbn, c\u00f4ng ngh\u1ec7 ph\u00e1t tri\u1ec3n tinh th\u1ec3 silicon carbide s\u1ebd d\u1ea7n tr\u1edf n\u00ean th\u00f4ng minh. Qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c theo d\u00f5i v\u00e0 ki\u1ec3m so\u00e1t theo th\u1eddi gian th\u1ef1c th\u00f4ng qua c\u00e1c c\u1ea3m bi\u1ebfn, h\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n t\u1ef1 \u0111\u1ed9ng v\u00e0 c\u00e1c thi\u1ebft b\u1ecb kh\u00e1c \u0111\u1ec3 c\u1ea3i thi\u1ec7n t\u00ednh \u1ed5n \u0111\u1ecbnh v\u00e0 kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t c\u1ee7a qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n. \u0110\u1ed3ng th\u1eddi, ph\u00e2n t\u00edch d\u1eef li\u1ec7u l\u1edbn v\u00e0 c\u00e1c c\u00f4ng ngh\u1ec7 kh\u00e1c c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 ph\u00e2n t\u00edch v\u00e0 t\u1ed1i \u01b0u h\u00f3a d\u1eef li\u1ec7u ph\u00e1t tri\u1ec3n nh\u1eb1m c\u1ea3i thi\u1ec7n ch\u1ea5t l\u01b0\u1ee3ng v\u00e0 hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t c\u1ee7a tinh th\u1ec3.<\/p>\n

C\u00f4ng ngh\u1ec7 chu\u1ea9n b\u1ecb tinh th\u1ec3 \u0111\u01a1n silicon carbide ch\u1ea5t l\u01b0\u1ee3ng cao l\u00e0 m\u1ed9t trong nh\u1eefng \u0111i\u1ec3m n\u00f3ng trong nghi\u00ean c\u1ee9u v\u1eadt li\u1ec7u b\u00e1n d\u1eabn hi\u1ec7n nay. V\u1edbi s\u1ef1 ti\u1ebfn b\u1ed9 kh\u00f4ng ng\u1eebng c\u1ee7a khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7, c\u00f4ng ngh\u1ec7 ph\u00e1t tri\u1ec3n tinh th\u1ec3 silicon carbide s\u1ebd ti\u1ebfp t\u1ee5c ph\u00e1t tri\u1ec3n v\u00e0 c\u1ea3i ti\u1ebfn, t\u1ea1o n\u1ec1n t\u1ea3ng v\u1eefng ch\u1eafc h\u01a1n cho vi\u1ec7c \u1ee9ng d\u1ee5ng silicon carbide \u1edf nhi\u1ec7t \u0111\u1ed9 cao, t\u1ea7n s\u1ed1 cao, c\u00f4ng su\u1ea5t cao v\u00e0 c\u00e1c l\u0129nh v\u1ef1c kh\u00e1c.<\/p>\n","protected":false},"excerpt":{"rendered":"

C\u00f4ng ngh\u1ec7 ch\u1ebf t\u1ea1o tinh th\u1ec3 silicon carbide \u0111\u01a1n ch\u1ea5t l\u01b0\u1ee3ng cao l\u00e0 m\u1ed9t trong nh\u1eefng \u0111i\u1ec3m n\u00f3ng trong nghi\u00ean c\u1ee9u v\u1eadt li\u1ec7u b\u00e1n d\u1eabn hi\u1ec7n nay.<\/p>\n","protected":false},"author":7,"featured_media":136025,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[852],"tags":[],"class_list":["post-136049","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-cong-nghiep-tin-tuc-vi"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/136049","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/comments?post=136049"}],"version-history":[{"count":0,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/136049\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media\/136025"}],"wp:attachment":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media?parent=136049"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/categories?post=136049"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/tags?post=136049"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}