{"id":136652,"date":"2025-12-15T14:05:28","date_gmt":"2025-12-15T06:05:28","guid":{"rendered":"https:\/\/www.alpapowder.com\/136652\/"},"modified":"2025-12-15T14:05:28","modified_gmt":"2025-12-15T06:05:28","slug":"bon-linh-vuc-ung-dung-chinh-cua-gom-su-silicon-nitride","status":"publish","type":"post","link":"https:\/\/www.alpapowder.com\/vi\/136652\/","title":{"rendered":"B\u1ed1n l\u0129nh v\u1ef1c \u1ee9ng d\u1ee5ng ch\u00ednh c\u1ee7a g\u1ed1m s\u1ee9 silicon nitride."},"content":{"rendered":"

\"\"<\/p>\n

L\u0129nh v\u1ef1c c\u01a1 kh\u00ed<\/p>\n

G\u1ed1m s\u1ee9 silicon nitride ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m van, \u1ed1ng d\u1eabn, b\u00e1nh xe ph\u00e2n lo\u1ea1i v\u00e0 d\u1ee5ng c\u1ee5 c\u1eaft g\u1ed1m trong ng\u00e0nh c\u00f4ng nghi\u1ec7p c\u01a1 kh\u00ed. \u1ee8ng d\u1ee5ng ph\u1ed5 bi\u1ebfn nh\u1ea5t l\u00e0 bi c\u1ea7u \u1ed5 tr\u1ee5c b\u1eb1ng g\u1ed1m silicon nitride. G\u1ed1m s\u1ee9 silicon nitride \u0111\u01b0\u1ee3c c\u00f4ng nh\u1eadn r\u1ed9ng r\u00e3i l\u00e0 v\u1eadt li\u1ec7u \u1ed5 tr\u1ee5c t\u1ed1t nh\u1ea5t, v\u00e0 nh\u1eefng “nh\u00e2n t\u1ed1 c\u1ed1t l\u00f5i” quan tr\u1ecdng nh\u1ea5t trong \u1ed5 tr\u1ee5c – bi c\u1ea7u \u1ed5 tr\u1ee5c b\u1eb1ng g\u1ed1m silicon nitride – ch\u00ednh l\u00e0 nh\u1eefng “ng\u01b0\u1eddi h\u00f9ng th\u1ea7m l\u1eb7ng” h\u1ed7 tr\u1ee3 hi\u1ec7u su\u1ea5t ho\u1ea1t \u0111\u1ed9ng c\u1ee7a thi\u1ebft b\u1ecb. Nh\u1eefng vi\u00ean bi g\u1ed1m nh\u1ecf n\u00e0y, c\u00f3 \u0111\u01b0\u1eddng k\u00ednh t\u1eeb v\u00e0i milim\u00e9t \u0111\u1ebfn v\u00e0i ch\u1ee5c milim\u00e9t, c\u00f3 v\u1ebb kh\u00f4ng \u0111\u00e1ng k\u1ec3, nh\u01b0ng v\u1edbi c\u00e1c \u0111\u1eb7c t\u00ednh “nh\u1eb9, c\u1ee9ng, \u1ed5n \u0111\u1ecbnh v\u00e0 c\u00e1ch \u0111i\u1ec7n”, ch\u00fang \u0111\u00f3ng vai tr\u00f2 “quan tr\u1ecdng” trong xe n\u0103ng l\u01b0\u1ee3ng m\u1edbi, gi\u00e0y tr\u01b0\u1ee3t patin, m\u00e1y khoan nha khoa v\u00e0 th\u1eadm ch\u00ed c\u1ea3 xe \u0111\u1ea1p cao c\u1ea5p.<\/p>\n

L\u0129nh v\u1ef1c h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5<\/p>\n

V\u1eadt li\u1ec7u g\u1ed1m silicon nitride c\u00f3 nh\u1eefng \u01b0u \u0111i\u1ec3m nh\u01b0 \u0111\u1ed9 b\u1ec1n cao, kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc t\u1ed1t, \u0111\u00e1p \u1ee9ng \u0111\u01b0\u1ee3c c\u00e1c y\u00eau c\u1ea7u kh\u1eaft khe v\u1ec1 v\u1eadt li\u1ec7u trong l\u0129nh v\u1ef1c h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5. G\u1ed1m s\u1ee9 silicon nitride c\u00f3 hai \u1ee9ng d\u1ee5ng kinh \u0111i\u1ec3n trong l\u0129nh v\u1ef1c h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5: th\u1ee9 nh\u1ea5t, silicon nitride \u0111\u01b0\u1ee3c coi l\u00e0 m\u1ed9t trong s\u1ed1 \u00edt v\u1eadt li\u1ec7u g\u1ed1m nguy\u00ean kh\u1ed1i c\u00f3 kh\u1ea3 n\u0103ng ch\u1ecbu \u0111\u01b0\u1ee3c s\u1ed1c nhi\u1ec7t v\u00e0 gradient nhi\u1ec7t nghi\u00eam tr\u1ecdng do \u0111\u1ed9ng c\u01a1 t\u00ean l\u1eeda hydro\/oxy t\u1ea1o ra, v\u00e0 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong v\u00f2i phun \u0111\u1ed9ng c\u01a1 t\u00ean l\u1eeda; th\u1ee9 hai, c\u00e1c \u0111\u1eb7c t\u00ednh tuy\u1ec7t v\u1eddi c\u1ee7a g\u1ed1m silicon nitride v\u00e0 v\u1eadt li\u1ec7u composite c\u1ee7a ch\u00fang, ch\u1eb3ng h\u1ea1n nh\u01b0 kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t, truy\u1ec1n s\u00f3ng v\u00e0 kh\u1ea3 n\u0103ng ch\u1ecbu t\u1ea3i, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh m\u1ed9t trong nh\u1eefng v\u1eadt li\u1ec7u truy\u1ec1n s\u00f3ng hi\u1ec7u su\u1ea5t cao th\u1ebf h\u1ec7 m\u1edbi \u0111ang \u0111\u01b0\u1ee3c nghi\u00ean c\u1ee9u.<\/p>\n

L\u0129nh v\u1ef1c b\u00e1n d\u1eabn<\/p>\n

Khi c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed ph\u00e1t tri\u1ec3n theo h\u01b0\u1edbng thu nh\u1ecf v\u00e0 hi\u1ec7u su\u1ea5t cao, bao b\u00ec b\u00e1n d\u1eabn \u0111\u00f2i h\u1ecfi y\u00eau c\u1ea7u cao h\u01a1n \u0111\u1ed1i v\u1edbi v\u1eadt li\u1ec7u t\u1ea3n nhi\u1ec7t. G\u1ed1m s\u1ee9 silicon nitride c\u00f3 \u0111\u1ed9 d\u1eabn nhi\u1ec7t l\u00ean \u0111\u1ebfn 90-120 W\/(m\u00b7K), v\u00e0 \u0111\u1ed9 t\u01b0\u01a1ng th\u00edch cao v\u1edbi h\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t c\u1ee7a tinh th\u1ec3 ch\u1ea5t n\u1ec1n b\u00e1n d\u1eabn th\u1ebf h\u1ec7 th\u1ee9 ba SiC, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c \u01b0u ti\u00ean cho ch\u1ea5t n\u1ec1n bao b\u00ec thi\u1ebft b\u1ecb \u0111i\u1ec7n SiC. Tr\u00ean th\u1ecb tr\u01b0\u1eddng qu\u1ed1c t\u1ebf, c\u00e1c c\u00f4ng ty Nh\u1eadt B\u1ea3n nh\u01b0 Toshiba v\u00e0 Kyocera chi\u1ebfm \u01b0u th\u1ebf, trong khi c\u00e1c c\u00f4ng ty trong n\u01b0\u1edbc nh\u01b0 Sinoma Advanced Materials \u0111\u00e3 \u0111\u1ea1t \u0111\u01b0\u1ee3c nh\u1eefng \u0111\u1ed9t ph\u00e1 v\u1ec1 c\u00f4ng ngh\u1ec7.<\/p>\n

Ngo\u00e0i vi\u1ec7c l\u00e0 v\u1eadt li\u1ec7u \u0111\u00f3ng g\u00f3i quan tr\u1ecdng, g\u1ed1m silicon nitride c\u00f2n cho th\u1ea5y tri\u1ec3n v\u1ecdng \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn. Trong qu\u00e1 tr\u00ecnh x\u1eed l\u00fd wafer, g\u1ed1m silicon nitride c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 s\u1ea3n xu\u1ea5t c\u00e1c b\u1ed9 ph\u1eadn gia nhi\u1ec7t ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 ch\u1ecbu s\u1ed1c nhi\u1ec7t, \u0111\u00e1p \u1ee9ng c\u00e1c \u0111i\u1ec1u ki\u1ec7n ho\u1ea1t \u0111\u1ed9ng kh\u1eafc nghi\u1ec7t c\u1ee7a c\u00e1c thi\u1ebft b\u1ecb nh\u01b0 CVD (l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc) v\u00e0 l\u00f2 khu\u1ebfch t\u00e1n. L\u0129nh v\u1ef1c y sinh h\u1ecdc<\/p>\n

L\u00e0 m\u1ed9t v\u1eadt li\u1ec7u g\u1ed1m sinh h\u1ecdc m\u1edbi n\u1ed5i, nitrua silic cho th\u1ea5y ti\u1ec1m n\u0103ng \u1ee9ng d\u1ee5ng tuy\u1ec7t v\u1eddi trong c\u1ea5y gh\u00e9p y t\u1ebf nh\u1edd c\u00e1c \u0111\u1eb7c t\u00ednh c\u01a1 h\u1ecdc v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch sinh h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i. C\u1ee5 th\u1ec3, nitrua silic \u0111\u00e3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m v\u1eadt li\u1ec7u sinh h\u1ecdc ch\u1ec9nh h\u00ecnh v\u00e0 \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng th\u00e0nh c\u00f4ng trong c\u00e1c b\u1ed9 ph\u1eadn ch\u1ecbu l\u1ef1c c\u1ee7a kh\u1edbp h\u00e1ng v\u00e0 kh\u1edbp g\u1ed1i nh\u00e2n t\u1ea1o \u0111\u1ec3 c\u1ea3i thi\u1ec7n kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n v\u00e0 k\u00e9o d\u00e0i tu\u1ed5i th\u1ecd c\u1ee7a c\u00e1c b\u1ed9 ph\u1eadn gi\u1ea3. H\u01a1n n\u1eefa, v\u1eadt li\u1ec7u nitrua silic \u0111\u00e3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 th\u00fac \u0111\u1ea9y s\u1ef1 h\u1ee3p nh\u1ea5t x\u01b0\u01a1ng trong ph\u1eabu thu\u1eadt c\u1ed9t s\u1ed1ng. V\u1eadt li\u1ec7u g\u1ed1m nitrua silic th\u1ec3 hi\u1ec7n s\u1ef1 \u1ed5n \u0111\u1ecbnh v\u00e0 \u0111\u1ed9 tin c\u1eady tuy\u1ec7t v\u1eddi trong l\u0129nh v\u1ef1c y t\u1ebf. Nitrua silic c\u0169ng th\u1ec3 hi\u1ec7n kh\u1ea3 n\u0103ng b\u00e1m d\u00ednh t\u1ebf b\u00e0o v\u00e0 d\u1eabn x\u01b0\u01a1ng m\u1ea1nh m\u1ebd, cung c\u1ea5p c\u01a1 s\u1edf sinh h\u1ecdc quan tr\u1ecdng cho \u1ee9ng d\u1ee5ng c\u1ee7a n\u00f3 trong s\u1eeda ch\u1eefa x\u01b0\u01a1ng. Tuy nhi\u00ean, t\u00ednh gi\u00f2n v\u1ed1n c\u00f3 c\u1ee7a g\u1ed1m nitrua silic v\u1eabn l\u00e0 m\u1ed9t th\u00e1ch th\u1ee9c l\u1edbn \u0111\u1ed1i v\u1edbi \u1ee9ng d\u1ee5ng c\u1ee7a n\u00f3 trong k\u1ef9 thu\u1eadt s\u1eeda ch\u1eefa x\u01b0\u01a1ng. Ngo\u00e0i ra, v\u1eadt li\u1ec7u nitrua silic kh\u00f3 b\u1ecb ph\u00e2n h\u1ee7y trong c\u01a1 th\u1ec3 s\u1ed1ng, \u0111i\u1ec1u n\u00e0y c\u1ea3n tr\u1edf s\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a m\u00f4 x\u01b0\u01a1ng m\u1edbi v\u00e0o v\u1ecb tr\u00ed s\u1eeda ch\u1eefa v\u00e0 s\u1ef1 thay th\u1ebf ho\u00e0n to\u00e0n v\u1eadt li\u1ec7u s\u1eeda ch\u1eefa ban \u0111\u1ea7u, do \u0111\u00f3 h\u1ea1n ch\u1ebf ph\u1ea1m vi \u1ee9ng d\u1ee5ng l\u00e2m s\u00e0ng c\u1ee7a n\u00f3.<\/p>\n","protected":false},"excerpt":{"rendered":"

L\u00e0 m\u1ed9t v\u1eadt li\u1ec7u g\u1ed1m sinh h\u1ecdc m\u1edbi n\u1ed5i, silicon nitride cho th\u1ea5y ti\u1ec1m n\u0103ng \u1ee9ng d\u1ee5ng tuy\u1ec7t v\u1eddi trong c\u1ea5y gh\u00e9p y t\u1ebf nh\u1edd c\u00e1c \u0111\u1eb7c t\u00ednh c\u01a1 h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch sinh h\u1ecdc cao.<\/p>\n","protected":false},"author":7,"featured_media":136627,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[852],"tags":[],"class_list":["post-136652","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-cong-nghiep-tin-tuc-vi"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/136652","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/users\/7"}],"replies":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/comments?post=136652"}],"version-history":[{"count":0,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/posts\/136652\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media\/136627"}],"wp:attachment":[{"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/media?parent=136652"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/categories?post=136652"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.alpapowder.com\/vi\/wp-json\/wp\/v2\/tags?post=136652"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}