Innovative applications of silicon carbide ceramics and 3D printing technology
Ceramic components for semiconductor equipment have high requirements in terms of material purity, dimensional accuracy, mechanical properties, thermal properties, and electrical properties. Silicon carbide ceramics are a type of material that has been proven by the market and has excellent performance for semiconductor equipment components. It is widely used in ceramic manipulators (stiffness, wear resistance), crystal boats (purity, high-temperature mechanical properties), and cold plates (thermal conductivity, rigidity). ), workbench (dimensional accuracy, execution stability) and other components have important applications.
However, in the face of market demands for large size, complex structure, short manufacturing cycle, high stability, and low cost, the traditional manufacturing process of silicon carbide ceramics has encountered bottlenecks. Use additive manufacturing technology to achieve a breakthrough in the manufacturing technology of ceramic components for silicon carbide ceramic semiconductor equipment.
3D printed semiconductor equipment silicon carbide ceramic components, according to different size, shape and purpose requirements, are processed through 3D printing, reaction sintering and finishing to obtain high purity, high temperature qualitative, high thermal conductivity, high temperature resistance, friction and wear resistance properties Excellent products that can meet the needs of many application scenarios for ceramic components in semiconductor equipment. This series of products has a short production cycle, is standardized and mass-produced, and can achieve differentiated structural design that is more suitable for efficient and high-quality production in the semiconductor industry.
Through 3D printing technology, we can design and manufacture silicon carbide ceramic parts with high purity, high temperature stability, high thermal conductivity, high temperature resistance, and excellent wear resistance according to different size, shape and functional requirements. These components not only meet the needs of diverse applications, but also have short production cycles, are standardized, can be mass-produced, can realize differentiated structural design, and are more suitable for efficient and high-quality production needs of various industries.
In addition, based on PEP (Powder Extrusion Printing) technology, we can manufacture ceramic and metal products with complex structures through “3D printing + powder metallurgy”. These products have consistent and excellent performance, which can effectively reduce the production cycle and production cost.
The space mirror is a large-sized, lightweight, integrated design near-net-shape silicon carbide ceramic complex structural component manufactured by Sublimation 3D based on the PEP process. The density can be as high as 99% and the mechanical properties are stable. It has effectively promoted the development of remote sensing satellites and the construction of space infrastructure, which can significantly reduce costs and shorten the R&D and production cycle. There is a huge market space for remote sensing satellites, which are the fastest growing in the commercial aerospace field.